JPS6211493B2 - - Google Patents

Info

Publication number
JPS6211493B2
JPS6211493B2 JP52026028A JP2602877A JPS6211493B2 JP S6211493 B2 JPS6211493 B2 JP S6211493B2 JP 52026028 A JP52026028 A JP 52026028A JP 2602877 A JP2602877 A JP 2602877A JP S6211493 B2 JPS6211493 B2 JP S6211493B2
Authority
JP
Japan
Prior art keywords
gas
oxygen
plasma
resist
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP52026028A
Other languages
English (en)
Japanese (ja)
Other versions
JPS53112065A (en
Inventor
Masahiro Shibagaki
Yasuhiro Horiike
Katsuo Sumino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP2602877A priority Critical patent/JPS53112065A/ja
Publication of JPS53112065A publication Critical patent/JPS53112065A/ja
Publication of JPS6211493B2 publication Critical patent/JPS6211493B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Drying Of Semiconductors (AREA)
JP2602877A 1977-03-11 1977-03-11 Removing method of high molecular compound Granted JPS53112065A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2602877A JPS53112065A (en) 1977-03-11 1977-03-11 Removing method of high molecular compound

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2602877A JPS53112065A (en) 1977-03-11 1977-03-11 Removing method of high molecular compound

Publications (2)

Publication Number Publication Date
JPS53112065A JPS53112065A (en) 1978-09-30
JPS6211493B2 true JPS6211493B2 (en]) 1987-03-12

Family

ID=12182239

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2602877A Granted JPS53112065A (en) 1977-03-11 1977-03-11 Removing method of high molecular compound

Country Status (1)

Country Link
JP (1) JPS53112065A (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0240280U (en]) * 1988-09-13 1990-03-19

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8004007A (nl) * 1980-07-11 1982-02-01 Philips Nv Werkwijze voor het vervaardigen van een halfgeleider- inrichting.
NL8004008A (nl) * 1980-07-11 1982-02-01 Philips Nv Werkwijze voor het vervaardigen van een halfgeleider- inrichting.
JPS5924846A (ja) * 1982-07-26 1984-02-08 エスヴィージー・リトグラフィー・システムズ・インコーポレイテッド ホトレジストの乾式現像法
JPH07118474B2 (ja) * 1984-12-17 1995-12-18 ソニー株式会社 エツチングガス及びこれを用いたエツチング方法
JPS61214434A (ja) * 1985-03-19 1986-09-24 Tokyo Denshi Kagaku Kk 有機膜の除去方法
JPS61267325A (ja) * 1985-05-22 1986-11-26 Tokyo Denshi Kagaku Kk 有機膜の除去方法
JPS62125627A (ja) * 1985-11-26 1987-06-06 Tokyo Denshi Kagaku Kk 有機膜の除去方法
JPH0773104B2 (ja) * 1986-02-14 1995-08-02 富士通株式会社 レジスト剥離方法
JPS62281331A (ja) * 1986-05-29 1987-12-07 Fujitsu Ltd エツチング方法
JP2624243B2 (ja) * 1986-09-19 1997-06-25 東京応化工業株式会社 有機膜の除去方法
JP2671435B2 (ja) * 1988-09-29 1997-10-29 富士通株式会社 灰化方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51110276A (ja) * 1975-03-25 1976-09-29 Tokyo Shibaura Electric Co Gasuetsuchingusochi

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0240280U (en]) * 1988-09-13 1990-03-19

Also Published As

Publication number Publication date
JPS53112065A (en) 1978-09-30

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